holographic laminar gratings for vacuum ultraviolet region
鍥?5 灞傜姸琛嶅皠鍏夋爡afm 鍥剧墖
鍒荤嚎鏁帮細 1200鏉?mm
鍒荤嚎娣卞害锛?15nm
宀涙触閲囩敤绂诲瓙鍒昏殌鎶€鏈強鍏ㄦ伅鏇濆厜鐨勫伐鑹烘柟娉曪紝鍔犲伐鍑哄彲閫傜敤浜庣湡绌虹传澶栧強杞痻绾块鍩熶娇鐢ㄧ殑灞傜姸寮忚灏勫厜鏍呫€?br> 姝ゆ鍏夋爡鍒荤嚎鐨勬埅闈㈠舰鐘跺涓婂浘鎵€绀猴紝鏄煩褰㈠舰鐘讹紝鏄湪鍚堟垚鐭宠嫳鐨勫熀搴曚笂鐩存帴鍒荤嚎鍔犲伐鑰屾垚锛岀壒鍒€傚悎鏂滃叆灏?br> 鍏夋簮鐨勮姹傘€?/p>
姒傚康鍥?/h3>
鍥?4 鐭╁舰琛嶅皠鍏夋爡鍒荤嚎鏂潰褰㈢姸鐨勬蹇靛浘
鍥?4 鐭╁舰琛嶅皠鍏夋爡鍒荤嚎鏂潰褰㈢姸鐨勬蹇靛浘
妫€娴嬩緥
